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Chemistry of Atomic Layer Deposition (De Gruyter Textbook)

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   Author: Baturi   |   30 December 2021   |   : 0

English | 2022 | ISBN: 3110712512 , 978-3110712513 | 116 pages | PDF EPUB | 5.35 MB
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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